Precision, Performance, Proven Metrology Solutions.
Cleanroom Metrology LLC
Cleanroom Metrology LLC delivers high-precision particle calibration and contamination control solutions to semiconductor fabs, aerospace and pharmaceutical cleanrooms, ISO suites, and advanced research environments around the world. From particle size standards to airflow visualization tools, we provide engineering-driven products and expert support for mission-critical metrology and contamination control needs.
Who We Are
Founded with a focus on metrology excellence and contamination control, Cleanroom Metrology LLC supports engineers, technicians, and cleanroom managers with precision-engineered calibration standards and specialized equipment. Our team combines hands-on technical experience with decades of industry insight, ensuring every solution meets the highest performance expectations.
We understand that calibration accuracy and contamination visualization are not optional they are essential to process reliability, yield optimization, and quality assurance in semiconductor manufacturing, aerosol research, and pharmaceutical clean environments.
What We Do
We specialize in two core categories of solutions:
1. Metrology and Calibration Standards
We produce NIST-traceable particle size standards and calibration wafers used to calibrate Scanning Surface Inspection Systems (SSIS) and other wafer inspection tools. These standards are essential for verifying size response, scan uniformity, and particle count efficiency in semiconductor fabs and research labs.
Our standards include:
Particle and PSL calibration wafer standards
Silica and polystyrene microsphere standards
Customized deposition configurations (full, half, spot)
Explore our full calibration product range here:
👉 Particle & PSL Calibration Wafer Standards
2. Smoke Studies and Airflow Visualization Tools
Visualization of airflow patterns is critical for Contamination Control and compliance with pharmaceutical and cleanroom standards (e.g., USP 797, ISO 14644-3). Our range of foggers and visualization equipment helps labs and production environments identify turbulence, dead zones, and airflow irregularities that standard particle counting cannot reveal.
We supply:
Cleanroom foggers for airflow visualization
Smoke study generators for ISO and cleanroom airflow compliance
Our Approach to Precision & Quality
At Cleanroom Metrology, quality isn’t just a label — it’s a foundation of everything we deliver. Every calibration standard and particulate product undergoes rigorous quality control and testing to ensure repeatability, traceability, and performance that engineers can rely on.
We emphasize:
Traceability to internationally recognized standards
Narrow size distributions for accurate calibration
Customized solutions for specific metrology requirements
Whether the application is wafer surface inspection or aerosol research, our products are engineered with precision from the ground up.
Customer Centric Support
We believe that great products should be backed by exceptional service. Our team is built on technical knowledge, not scripted responses and a commitment to helping you find the right solution for your unique calibration or contamination control challenge.
When you contact Cleanroom Metrology, you speak with people who:
- Understand your technical requirements
- Know how tools behave in real cleanroom environments
- Can explain how our solutions support your performance goals
Who We Serve
We are trusted by:
- Semiconductor metrology engineers
- Cleanroom and process managers
- Aerosol science research labs
- Pharmaceutical and ISO suite teams
- Aerospace and advanced manufacturing facilities
Our products support both routine calibration needs and strategic contamination control studies across industries that demand unambiguous measurement confidence.
Our Mission
To provide metrology solutions that combine scientific precision with operational practicality, enabling engineers and managers to achieve consistent measurement results, faster problem resolution, and better control of contamination risks.
We believe:
- Precision matters.
- Quality can be verified.
- Support should be technical, not generic.
What Our Clients Say
Cleanroom Metrology’s Calibration Wafer Standards are NIST Traceable and help my staff keep our KLA-Tencor tools in size calibration. They understand the technical language of SSIS calibration and are able to easily specify what I need for our Technicians and Engineers to keep our equipment in calibration for ISO requirements. Their attention to quality and specifications is unmatched.
The particle size accuracy and repeatability of particle sizes from Cleanroom Metrology LLC makes the calibrations of our aerosol particle counters much more consistent in our Metrology Lab. Their particle technology is superb!
About Cleanroom Metrology LLC
Cleanroom Metrology LLC is at the forefront of Particle Deposition by providing PSL Wafer Standards for Calibration of SSIS tools using Silica microsphere and Polystyrene particle size standards and beads. Our Silica and Polystyrene beads are used as Particle Size Standards around the world in aerosol research. Our Smoke Studies Fogger support USP 797 Guidelines for airflow visualization studies and FDA smoke studies of clean rooms, ISO suites and process labs around the world.
Our PSL Wafer Standards produced as a Full Deposition, Half Deposition, Spot Deposition and Circle Deposition calibration wafer standards are produced to support Semi Standards M52 guidelines for contamination control and size calibration of Scanning Surface Inspection Systems and SSIS tools by providing NIST Traceable, particle size accuracy in the size calibration of SSIS tools, such as KLA-Tencor SP1 TBI, SP2, SP2XP, SP5 un-patterned wafer inspection systems, as well as KLA patterned wafer defect inspection systems. We focus on product quality, product performance and particle size standards.
Our Precision-Engineered Metrology Products
PSL & Silica Wafer Standards
Engineered to the highest specifications, our silica wafer standards are deposited with NIST Traceable particle size standards on ultra-clean silica wafers, which are essential for maintaining size and calibration accuracy of unpatterned Wafer Inspection Systems and pattern defect Surface Scanning Inspection Systems around the world.
Polystyrene Latex Beads
3000 Series and 4000 Series polystyrene latex beads are micro-sphere particle size standards produced from 20 nanometers to 1000 microns, typically in a 15 mm bottle, with 1% or less concentration in De-Ionized water solution. Dry Beads are also available in 1 g, 5 g and up to 1 kg volume. Our Micro-spheres and dry beads are known worldwide for NIST Traceability, size accuracy and narrow size distribution used in a wide range of contamination control and aerosol science applications.
Silica Micro-Spheres
We offer silica micro-sphere, particle size standards, typically used in the deposition of Contamination Calibration Wafer Standards. Silica particles are also used in drug delivery systems to transport, protect, and release drugs in a controlled manner in human and animal applications. Silica nano-particles are especially beneficial in CMP Slurry applications of surface polish of 150mm, 200mm and 300mm silicon wafers.
At Cleanroom Metrology LLC, our unwavering commitment to innovation, quality, and customer support is the cornerstone of our success. We continuously push the boundaries of technology to develop cutting-edge contamination wafer standards and Smoke Studies Fogger to support USP and FDA airflow visualization in smoke studies, as well as particle size calibration of Metrology instruments.
Our Polystyrene and Silica Particle Size Standards provide the size accuracy demanded by aerosol and metrology research engineers. We provide our customers with highly accurate wafer standards, size standards and smoke study tools to achieve optimal contamination control goals. Customer satisfaction is at the heart of everything we do, and we strive to exceed expectations by offering tailored solutions and exceptional support.
Discover Our Precision-Engineered Solutions
Call us to specify the Calibration Wafer Standard you need to calibrate your wafer inspection tools. We produce 300 mm, 200 mm, 150 mm, 100 mm wafer calibration standards and silica contamination wafer standards on ultra-clean silicon wafers for many Semiconductor Metrology Managers around the world. We can produce Wafer Standards using polystyrene or silica microspheres, as imaged at right. Our particle size standards and beads are used in Aerosol Science, Metrology and CMP Slurry applications around the world. Contact us today at 303-999-6837 to discuss your requirements for Wafer Calibration Standards, Smoke Studies Foggers and NIST Traceable, Particle Size Standards.
John Turner – Founder & Cleanroom Metrology Expert
John Turner is the founder and driving force behind Cleanroom Metrology, bringing decades of equipment application experience in cleanroom smoke studies and the size calibration of wafer inspection systems. Cleanroom Foggers and ultrapure LN2 Foggers are used in both the pharmaceutical and semiconductor industries, and many engineers contact John on the use of these tools in their smoke studies. John is familiar with cleanroom certification, airflow reclaim using particle size standards, as well as laser particle counter calibration, airflow visualization, and particle sizing in aerosol studies.
Throughout his career, John has worked closely with pharmaceutical cleanroom engineers, medical device technicians, semiconductor metrology engineers and cleanroom manufacturers to support compliance with ISO standards and contamination control requirements. His knowledge and use of the various types of size standards has made him one of the most trusted names among metrology engineers, quality managers, and cleanroom managers in pharmaceutical and semiconductor companies.
John leads Cleanroom Metrology with a focus on size accuracy and application of the size standards being used in ISO regulatory compliance. His practical field experience, technical expertise, and dedication to delivering the most reliable cleanroom foggers and accurate calibration size standards, ensures his customers receive accurate information, which they can put into immediate use. Under his leadership, Cleanroom Metrology is built on technical excellence, integrity, and a commitment to helping Metrology Engineers and Cleanroom Managers maintain the highest standards in their controlled environments.
Get in Touch
Ready to elevate your contamination control processes? Contact Cleanroom Metrology LLC today to learn more about our tailored solutions and request a quote.