28 Years Providing Cleanroom Foggers for USP797 and ISO Standard 14644-3 Smoke Studies, Calibration Wafer Standards and Particle Size Standards

Precision, Performance, Proven Metrology Solutions.

Cleanroom Metrology LLC

Cleanroom Metrology LLC delivers high-precision particle calibration and contamination control solutions to semiconductor fabs, aerospace and pharmaceutical cleanrooms, ISO suites, and advanced research environments around the world. From particle size standards to airflow visualization tools, we provide engineering-driven products and expert support for mission-critical metrology and contamination control needs.

Who We Are

Founded with a focus on metrology excellence and contamination control, Cleanroom Metrology LLC supports engineers, technicians, and cleanroom managers with precision-engineered calibration standards and specialized equipment. Our team combines hands-on technical experience with decades of industry insight, ensuring every solution meets the highest performance expectations. 

We understand that calibration accuracy and contamination visualization are not optional they are essential to process reliability, yield optimization, and quality assurance in semiconductor manufacturing, aerosol research, and pharmaceutical clean environments.

What We Do

We specialize in two core categories of solutions:

1. Metrology and Calibration Standards

We produce NIST-traceable particle size standards and calibration wafers used to calibrate Scanning Surface Inspection Systems (SSIS) and other wafer inspection tools. These standards are essential for verifying size response, scan uniformity, and particle count efficiency in semiconductor fabs and research labs.

Our standards include:

  • Particle and PSL calibration wafer standards

  • Silica and polystyrene microsphere standards

  • Customized deposition configurations (full, half, spot)

Explore our full calibration product range here:
👉 Particle & PSL Calibration Wafer Standards


2. Smoke Studies and Airflow Visualization Tools

Visualization of airflow patterns is critical for Contamination Control and compliance with pharmaceutical and cleanroom standards (e.g., USP 797, ISO 14644-3). Our range of foggers and visualization equipment helps labs and production environments identify turbulence, dead zones, and airflow irregularities that standard particle counting cannot reveal.

We supply:

  • Cleanroom foggers for airflow visualization

  • Smoke study generators for ISO and cleanroom airflow compliance

Our Approach to Precision & Quality

At Cleanroom Metrology, quality isn’t just a label — it’s a foundation of everything we deliver. Every calibration standard and particulate product undergoes rigorous quality control and testing to ensure repeatability, traceability, and performance that engineers can rely on.

We emphasize:

  • Traceability to internationally recognized standards

  • Narrow size distributions for accurate calibration

  • Customized solutions for specific metrology requirements

Whether the application is wafer surface inspection or aerosol research, our products are engineered with precision from the ground up.

Customer Centric Support

We believe that great products should be backed by exceptional service. Our team is built on technical knowledge, not scripted responses and a commitment to helping you find the right solution for your unique calibration or contamination control challenge.

When you contact Cleanroom Metrology, you speak with people who:

  • Understand your technical requirements
  • Know how tools behave in real cleanroom environments
  • Can explain how our solutions support your performance goals

Who We Serve

We are trusted by:

  • Semiconductor metrology engineers
  • Cleanroom and process managers
  • Aerosol science research labs
  • Pharmaceutical and ISO suite teams
  • Aerospace and advanced manufacturing facilities


Our products support both routine calibration needs and strategic contamination control studies across industries that demand unambiguous measurement confidence.

Our Mission

To provide metrology solutions that combine scientific precision with operational practicality, enabling engineers and managers to achieve consistent measurement results, faster problem resolution, and better control of contamination risks.

We believe:

  • Precision matters.
  • Quality can be verified.
  • Support should be technical, not generic.

What Our Clients Say

quote

Cleanroom Metrology’s Calibration Wafer Standards are NIST Traceable and help my staff keep our KLA-Tencor tools in size calibration. They understand the technical language of SSIS calibration and are able to easily specify what I need for our Technicians and Engineers to keep our equipment in calibration for ISO requirements. Their attention to quality and specifications is unmatched.

quote

The particle size accuracy and repeatability of particle sizes from Cleanroom Metrology LLC makes the calibrations of our aerosol particle counters much more consistent in our Metrology Lab. Their particle technology is superb!

Get in Touch

Ready to elevate your contamination control processes? Contact Cleanroom Metrology LLC today to learn more about our tailored solutions and request a quote.