Calibration Wafer Standards,
Cleanroom Smoke Studies,
Airflow Visualization Foggers,
Silica Microspheres,
Polystyrene Microspheres,
Particle Size Standards
Calibration Wafer Standards
Our Calibration Wafer Standards are produced for calibration of KLA-Tencor, Hitachi, etc. wafer inspection machines, referred to as SSIS tools. Polystyrene microspheres are deposited from 20 nm up to 15 µm on the surface of 300mm wafer standards. Polystyrene microspheres are deposited from 80 nm up to 15 µm on the surface of 200mm wafer standards, while 150mm wafers typically allow 150nm particle size standards and above.
We also produce wafer standards on 100mm wafers, customer supplied FILM DEPOSITED Wafers, EPI Wafers and QUARTZ MASKS , all which are used to calibrate the size accuracy and size response of your Tencor, KLA, KLA-Tencor, Hitachi, TopCon, Applied Materials, Tokyo Electron wafer inspection systems and SSIS scanning systems. Circle Depositions, called SPOT Depositions, HALF Depositions and FUL Depositions are provided.
Our 300mm Prime Silica wafers are cleaned down to 18nm, while 200mm prime silica wafers are cleaned down to 80nm. Our 300mm and 200mm silica wafers start out quite clean, allowing for a number of particle size depositions on a single wafer. Multiple particle depositions, Circle and SPOT Depositions, on a single wafer have the advantage of enabling your wafer inspection system, commonly called a scanning surface inspection system or SSIS, to be verified for calibration accuracy across a broad range of sizes during a single wafer scan.
On the other hand, FULL Deposition wafer standards provide a single particle size calibration during a wafer scan, while allowing the Metrology Engineer to observe how uniform the particle detection is across the entire surface of a uniformly deposited, Full Deposition Wafer Standard.
Ultrasonic Cleanroom Foggers
Our Ultrasonic Cleanroom Foggers used in smoke studies and airflow visualization, are also referred to as smoke generators and smoke machines. Click Here to compare the performance specs of our ultrasonic and LN2 cleanroom foggers. Cleanroom Foggers are used in Pharmaceutical ISO Suites, Semiconductor Clean Rooms an rooms and ISO suites to verify airflow uniformity in the clean room, around equipment and from ISO Suite to ISO Suite. Smoke Studies and Airflow Visualization Studies are mandated in the Semiconductor industry using USP797 guideline, SEMI Standards guidelines or ISO guidelines.
The pharmaceutical industry is controlled by USP 797 and FDA guidelines in most smoke studies. We provide ultrasonic foggers and LN2 Foggers for Smoke Studies, using 80mm fog outlet or 80mm dual fog outlets, combined with fog velocity control and fog volume control with controlled fog output to visualize airflow turbulence and dead airflow zones in cleanrooms, bio-safety cabinets, airflow hoods, barrier isolators, etc.
LN2 Ultrapure Cleanroom Foggers
Our stainless steel foggers are designed with brushed stainless steel, 80mm fog outlets, fog velocity and fog volume control; and also has optional wireless remote control along with 11 different fog attachment accessories for smoke studies in clean rooms, ISO suites, sterile rooms, Barrier Isolators, etc. Click Here to compare the performance specs of our ultrasonic and LN2 cleanroom foggers. Our Apollo 35, Apollo 50, Apollo 100 and Apollo 150 use liquid nitrogen and pure water (De-Ionized, WFI or Sterile) to produce a very dense, ultrapure, adjustable fog volume providing a superb airflow visualization with a paper-white fog. The technology of the nitrogen foggers is unmatched by any other fog generating technology used in clean rooms, ISO Suites, Sterile Rooms, Barrier Isolators, etc.
Liquid Nitrogen foggers produce far more fog than ultrasonic transducers, CO2 (dry ice) or glycol fluid/hot wire technology. The Apollo 35 and Apollo 50 nitrogen-di-water fog machines are our standard LN2 foggers with 1 80mm fog outlet, while the Apollo 100 has two 80mm fog outlets and Apollo 150 has three 80mm fog outlets to reduce the amount of time needed to conduct a complete smoke study. Our nitrogen foggers are used for contamination free, smoke studies, air flow visualization and mapping studies in clean rooms, sterile rooms, medical surgery rooms, ISO suites, etc., according to ISO 14644-3 annex b7, or ISO 14644-2 guidelines.
Particle Size Standards
Our Particle Size Standards are highly accurate, NIST Traceable, size standards typically used to calibrate aerosol particle counters for size accuracy. Polystyrene microspheres suspended in Di Water are available from 20 nm to 160 µm; and Dry Polystyrene Microspheres are available in powder/spheres from 200 µm to 1000 µm. Silica micro-spheres are provided from 30 nm to 1 µm (1000nm). Both types of particle size standards are used in aerosol research, particle counter size calibration and Pharmaceutical drug delivery. Silica micro-spheres are especially beneficial in Semiconductor metrology for Calibration Wafer Standards.
Recommended Products
PSL Wafer Standards used for SSIS Size Calibration
Our Wafer Calibration Standards are used in Semiconductor Metrology Clean Rooms to calibrate the size accuracy and scanning uniformity response of Wafer Inspection Systems and Scanning Surface Inspection Systems (SSIS) using highly accurate, NIST Traceable, particle size standards with narrow size distributions.
Polystyrene Microspheres, NIST Traceable Sizing, Narrow Size Distributions
Our Polystyrene latex micro-sphere, particle size standards provide exceptional size accuracy and narrow size distribution for use and in Aerosol Particle Research, as well as in deposition of Calibration Wafer Standards.
Silica Microspheres for Semiconductor Metrology, CMP Slurry & Pharmaceutical Drug Delivery
NIST Traceable, Silica Microsphere, particle size standards are provided for size calibration of high power UV, DUV & blue laser wafer inspection systems. Silica particle size standards are also used in Drug Delivery and in CMP Slurries at 300 nm, 500 nm and 800 nm.
Smoke Studies Fogger for Airflow Visualization Studies, USP 797
Our Nitrogen-DI-Water Smoke Study Machines and Ultrasonic Smoke Studies Foggers are used in Airflow Visualization Studies of Pharmaceutical process labs, ISO Suites and Semiconductor Clean Rooms to visualize air flow, turbulence, patterns, uniformity and to locate dead zones around equipment and under doorway entrances.
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John Turner – Founder & Cleanroom Metrology Expert
John Turner is the founder and driving force behind Cleanroom Metrology, bringing decades of equipment application experience in cleanroom smoke studies and the size calibration of wafer inspection systems. Cleanroom Foggers and ultrapure LN2 Foggers are used in both the pharmaceutical and semiconductor industries, and many engineers contact John on the use of these tools in their smoke studies. John is familiar with cleanroom certification, airflow reclaim using particle size standards, as well as laser particle counter calibration, airflow visualization, and particle sizing in aerosol studies.
Throughout his career, John has worked closely with pharmaceutical cleanroom engineers, medical device technicians, semiconductor metrology engineers and cleanroom manufacturers to support compliance with ISO standards and contamination control requirements. His knowledge and use of the various types of size standards has made him one of the most trusted names among metrology engineers, quality managers, and cleanroom managers in pharmaceutical and semiconductor companies.
John leads Cleanroom Metrology with a focus on size accuracy and application of the size standards being used in ISO regulatory compliance. His practical field experience, technical expertise, and dedication to delivering the most reliable cleanroom foggers and accurate calibration size standards, ensures his customers receive accurate information, which they can put into immediate use. Under his leadership, Cleanroom Metrology is built on technical excellence, integrity, and a commitment to helping Metrology Engineers and Cleanroom Managers maintain the highest standards in their controlled environments.
