Calibration Wafer Standards are also known as PSL wafer standards or particle wafer standards, all of which are focused exclusively on the size calibration of the wafer inspection systems used for particle contamination monitoring in IC manufacturing fabs, like Intel Corp, Samsung, Hitachi, etc. Producing wafer standards requires a knowledge of the type of particles encountered in IC manufacturing and the SSIS tools used to detect and size unwanted nano-particles. Being able to specify the wafer standards according to the specifications of the customer is critical in order to produce the wafer standard based on the calibration requirements of the respective wafer inspection tools that require size calibration. Semiconductor metrology labs that maintain in-house particle deposition tools and Application Engineers, that communicate the technical requirements of the customers to the Particle Deposition Manager, are quite effective at producing wafer standards according to specification. Shipping speed depends on whether the calibration wafer is FULL Deposition wafer using one particle size, or a custom-configured, complex SPOT Dep wafer standard with up to 10 particle sizes being deposited.
Cleanroom Metrology LLC provides both type of technical support to customers who want one or more FULL Dep wafer standards using common particle sizes at 100nm, 500nm, 1 micron, etc. When you require a complex particle deposition, the Application Engineers at Cleanroom Metrology are quite capable of discussing the particle sizes requested, and equally able to discuss particle calibration sizes that certain wafer inspection systems have difficulty with for calibration. Knowing the weaknesses and strengths of the various wafer inspection designs is a technical strength that most Particle Deposition labs are unable to provide. But at Cleanroom Metrology, we have experience working with particle sizes from 10 nanometers up to 15 micron on SSIS tools using a wide range of laser wavelengths at normal angle of incidence as well as low angle of incidence. We produce test samples on complex depositions, so that the Wafer Standard produced is deposited correctly the first time.
We provide rapid replies to your questions, and once your order is in our production queue, our Application Engineers work directly with the Particle Deposition lab to get your wafer standards in the production queue. Each wafer standard is produced with NIST Traceable particle size standards to ensure the size peak is accurate and narrow. Once we have produced your standard to your specification, we then certify the particle size peak, as referenced to a NIST Traceable SRM. When your wafer standard is completed with particle deposition and Calibration Size Certificate is verified and printed, we then place your wafer standard(s) in a single wafer carrier, and triple bag the wafer standards in a Fed Ex package. Now, your wafer standard is ready to ship overnight, anyplace around the world to your dock; produced with correct technical specifications, evaluated for correct particle sizing with NIST Traceability to meet any 9000 ISO standards you work with.
For fabs and labs with urgent tool qualification or downtime concerns, working with suppliers that combine responsive technical review, domestic fulfillment, and clear lead-time communication is key to minimizing delays. Call Cleanroom Metrology at 719-850-4215 to speak with John Turner directly. He has over 40 years of particle deposition metrology experience, so you have the highest level of experience available to your staff.
Create your particle wafer standard using our simplified method to create a technical specification and quote request, or give us a call at 719-850-4220:
Particle and PSL Calibration Wafer Standards | NIST Traceable