KLA-Tencor Surfscan Parts Contract – 6100, 6200 and 6400 Series

Description

Annual parts coverage for Surfscan 6100, 6200 and 6400 series tools

*Argon laser and puck replacement is limited to one per year, as needed due to failure.

A failed board or laser on a legacy Surfscan can be expensive to source and slow to replace, and unplanned parts spending is hard to budget. The Surfscan parts contract turns that risk into a fixed annual cost: covered parts are shipped to you, with senior-level tech support to diagnose the fault and shipping paid both ways.

What does the Surfscan parts contract cover, and what is excluded?

Covered: 100% of parts on the contracted tool, supplied as new upgraded or refurbished parts. Argon laser and puck replacement is included once per year when needed due to failure. Every contract includes a universal service tool kit and one NIST-traceable calibration wafer standard.

Plans: choose parts only if your technicians do the repairs, or parts, labor and travel if you want our engineers to handle the service visit.

Not covered: customer damage. A remote or onsite system audit is required before the contract is accepted, to verify the tool is operating.

One-year or two-year contract

Tool still running an argon laser? The Surfscan Solid State Laser Upgrade removes the recurring laser replacement. For tools that need more than parts, see the Surfscan Refurbishment Service. Add PSL calibration wafer standards or browse all Surfscan wafer inspection systems.

FAQs about the KLA-Tencor Surfscan Parts Contract

Which Surfscan models are covered?

Surfscan 6100, 6200 and 6400 series tools, after a remote or onsite system audit.

Is the argon laser covered?

Yes, argon laser and puck replacement is covered once per year, as needed due to failure.

What does a 2-year contract add?

The Surfscan CPU computer upgrade, plus your choice of an annual PM with calibration or a repair service call.

What is not covered?

Customer damage is not covered.