Description
Surfscan refurbishment that extends the life of 6000-series tools
| Service | Advanced refurbishment of KLA-Tencor Surfscan wafer inspection tools |
| Models | Surfscan 6100, 6200 and 6400 series |
| Mechanical | New parts, new motors and rebuilt assemblies |
| Electronics | Advanced circuit board design for faster mean time to repair |
| Laser | Solid state laser |
| Computer | Faster computer with solid state drives |
| Display | LCD color monitor |
| Printing | Print server for Windows 11 printers; color laser printer included |
| Calibration | NIST-traceable calibration standards pack |
| Warranty | 12 months, parts and labor |
| After Service | Service parts contracts available |
Surfscan 6000-series tools are about 30 years old, the OEM has limited parts, if any, and many fabs and labs still need these tools in production for another decade. Our Surfscan refurbishment service rebuilds the tool around new and redesigned parts so it can stay in service with predictable support.
The refurbishment replaces the wear parts that most often take a Surfscan offline (motors and mechanical assemblies), modernizes the parts that are obsolete (computer, drives, monitor and printing), and fits a solid state laser in place of the original gas laser. The tool returns with a NIST-traceable calibration standards pack and a 12-month parts and labor warranty.
Refurbishment, upgrade or parts contract: which does your Surfscan need?
| If your Surfscan… | Choose |
| Has one failing subsystem (laser or computer) but is otherwise healthy | A targeted upgrade: Solid State Laser Upgrade or CPU Upgrade Kit |
| Has worn motors and assemblies, obsolete electronics and must run 10 more years | This refurbishment service |
| Runs well today and you want predictable parts cost | Surfscan parts contract |
| Needs to be replaced entirely | A refurbished Surfscan 6100 Upgraded system |
Each Surfscan arrives with a different history, so every refurbishment is scoped after we review your tool. Send your model, serial number and known issues with your quote request.
Keep sizing accurate after refurbishment with PSL calibration wafer standards, or browse all Surfscan wafer inspection systems.
FAQs about the KLA-Tencor Surfscan Refurbishment Service
Which Surfscan models can be refurbished?
Surfscan 6100, 6200 and 6400 series tools.
What warranty comes with a refurbished Surfscan?
12 months, parts and labor.
Does refurbishment replace the argon laser?
Yes. The refurbishment includes a solid state laser.
How is the refurbishment priced?
Every tool is different, so refurbishment is quoted after reviewing your model, serial number and condition.
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