Description
Tencor Surfscan 6100 Ultimate Refurbished with optional SECS/GEM data output and 6 month warranty
| System Type | Tencor/KLA-Tencor Surfscan 6100 Ultimate, unpatterned wafer surface inspection system (SSIS), refurbished |
| Particle Detection | ≈ 0.16 µm (160 nm) at a 95% capture rate, based on a PSL NIST calibration wafer standard; accuracy within 2% against its NIST-traceable standard |
| Laser | New red 632 nm HeNe laser; matches Surfscan 4500 and 5500 data |
| Data Output | Optional SECS/GEM data protocol on brand-new, improved main PC boards |
| Optics | Normal angle of incidence (90°); optical mirrors cleaned, adjusted and calibrated |
| Detector | Photo Multiplier Tube (PMT) |
| Storage | Solid state hard drives |
| Wafer Size | Bare silicon 2–4 inch or 4–8 inch; maximum 200 mm (8 inch) |
| Included | Windows print server; 3 full-deposition, Calibration Wafer Standards, 204nm, 500nm, 1019nm, 6 month warranty on parts |
| Power | 208 VAC, single-phase, 60 Hz, 17 A |
| Warranty | 6 months, extended warranty optional |
| Lead Time | About 2 months, typical, this Surfscan 6100 Ultimate Wafer Defect Inspection System available in 1st Quarter 2027 |
The Surfscan 6100 Ultimate combines everything in the Surfscan 6100 Enhanced with optional SECS/GEM main boards, solid state hard drives, haze measurement down to 0.02 ppm, three included calibration wafers and an included 6-month warranty. It scans bare silicon wafers for particles and surface anomalies, sizes each light point defect (LPD), produces a wafer map and provides haze-related (surface roughness) information for process monitoring and failure analysis. It is not intended for patterned wafers, wafer pieces, quartz masks or glass slides.
Like the Enhanced, the Ultimate replaces the original 30 mW argon laser configuration that had about 204 nm particle detection sensitivity, with a NEW red 632 nm HeNe laser, new main PC boards and a calibrated optical system optimized with 160 nm Particle Defect Detection and Haze measurements. The red laser keeps data correlated with Surfscan 4500 and 5500 tools.
What does SECS/GEM data output add to a Surfscan 6100?
SECS/GEM is the SEMI communication standard that semiconductor factories use to connect process and metrology tools to the factory host system. With SECS/GEM, the host can collect scan results, status and alarms directly from the Surfscan instead of relying on printouts, manual entry or file transfers.
For a particle inspection step, that means LPD counts and haze results can feed statistical process control (SPC) charts automatically, lots can be dispositioned faster, and data-entry errors disappear. SECS/GEM data output is optional on both the 6100 Ultimate and the 6100 Enhanced, and comes installed on the 6220 and 6420 Ultimate.
Ultimate, Enhanced or standard Surfscan 6100?
If you do not need calibrated haze measurement, the Surfscan 6100 Enhanced provides the same laser, boards and calibration wafers. If you need a system quickly, the refurbished Surfscan 6100 Upgraded typically ships in about a week.
| Feature | Surfscan 6100 Upgraded | Surfscan 6100 Enhanced | Surfscan 6100 Ultimate | Surfscan 6220 Ultimate | Surfscan 6420 Ultimate |
| Particle detection on bare silicon | ≈ 0.204 µm (204 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.12 µm (120 nm) at 95% capture rate | ≈ 0.100 µm (100 nm) at 95% capture rate |
| Haze (surface roughness) measurements / resolution | Yes, customer calibrates | Yes, customer calibrates | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm |
| Laser and scan | Red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, blue, solid state 488 nm laser | New, blue, solid state 488 nm laser |
| Optical detector | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) |
| Incidence angle | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 204 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 160 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 160 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 120 nm & haze (surface roughness) measurements | Low-angle (oblique) incidence illumination for unpatterned silicon wafer defect detection down to 100 nm & haze (surface roughness) measurements |
| Main PC boards | Checked for system operation, engineering updates | Brand-new main PC boards supporting original design | Brand-new, improved main PC boards, optional SECS/GEM data output | Brand-new, improved main PC boards, including SECS/GEM data output | Brand-new, improved main PC boards, including SECS/GEM data output |
| SECS/GEM data output | Optional | Optional | Optional | Yes, SECS/GEM data protocol installed | Yes, SECS/GEM data protocol installed |
| Hard drives | Solid state | Solid state | Solid state | Solid state | Solid state |
| Optical mirrors cleaned and adjusted | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for blue 488 nm laser | Yes, optical system cleaned and adjusted for blue 488 nm laser |
| Calibration wafer standards | Optional, 3 full-deposition calibration wafer standards, 220 nm, 500 nm, 1019 nm | Optional, 3 full-deposition calibration wafer standards, 204 nm, 500 nm, 1019 nm | Included, 3 full-deposition calibration wafer standards, 204 nm, 500 nm, 1019 nm | Included, 4 full-deposition calibration wafer standards, 126 nm, 304 nm, 700 nm, 1019 nm | Included, 4 full-deposition calibration wafer standards, 100 nm, 304 nm, 700 nm, 1019 nm |
| Installation and calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration |
| Windows print server | Optional | Yes | Yes | Yes | Yes |
| Warranty | 6 months optional, travel not included | 6 months optional, travel not included | 6 months included; extended optional, travel not included | 1 year included; extended optional, travel not included | 1 year included; extended optional, travel not included |
| Availability | January 2027 | January 2027 | 1st Quarter 2027 | 1st Quarter 2027 | 2nd Quarter 2027 |
Extend coverage beyond the included warranty with a Surfscan parts contract, add PSL calibration wafer standards, or browse all Surfscan wafer inspection systems.
FAQs about the Tencor Surfscan 6100 Ultimate Wafer Defect Inspection System
What is the difference between the Ultimate and the Enhanced?
The Ultimate adds brand-new main PC boards with optional SECS/GEM data output, solid state hard drives, haze measurement down to 0.02 ppm, three included calibration wafers and an included 6-month warranty.
What warranty does the Surfscan Ultimate Refurbished include?
6 months. Extended warranty is optional, SECS/Gem Data Output, new improved Main PC Boards and circuit boards; travel is not included.
What is the lead time?
Typically about 2 months.
Can the Ultimate replace a Surfscan 4500 or 5500?
Yes. Its red 632 nm HeNe laser matches 4500 and 5500 particle data.
Reviews
There are no reviews yet.