Refurbished KLA-Tencor Surfscan
Wafer Inspection Systems
Used and refurbished Surfscan 6100, 6220 and 6420 unpatterned wafer inspection systems, with laser upgrades, refurbishment and parts contracts for Surfscan 6100, 6200 and 6400 series tools.
A KLA-Tencor Surfscan is a laser-scanning unpatterned wafer surface inspection system (SSIS), often called a wafer particle counter. It detects, counts, sizes and maps particles (light point defects) and measures haze (surface roughness) on bare silicon wafers. Our refurbished Surfscan systems detect particles from ≈ 204 nm down to ≈ 100 nm at a 95% capture rate, with a red 632 nm HeNe or a blue 488 nm solid state laser, and particle sizing referenced to NIST-traceable PSL wafer standards.
Refurbished Surfscan Systems and Services
Surfscan 6100 vs 6220 vs 6420
| Feature | Surfscan 6100 Upgraded | Surfscan 6100 Enhanced | Surfscan 6100 Ultimate | Surfscan 6220 Ultimate | Surfscan 6420 Ultimate |
|---|---|---|---|---|---|
| Particle detection | ≈ 0.204 µm (204 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.12 µm (120 nm) at 95% capture rate | ≈ 0.100 µm (100 nm) at 95% capture rate |
| Laser | Red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, blue, solid state 488 nm laser | New, blue, solid state 488 nm laser |
| Haze | Yes, customer calibrates | Yes, customer calibrates | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm |
| SECS/GEM data output | Optional | Optional | Optional | Yes, SECS/GEM data protocol installed | Yes, SECS/GEM data protocol installed |
| Warranty | 6 months optional, travel not included | 6 months optional, travel not included | 6 months included; extended optional, travel not included | 1 year included; extended optional, travel not included | 1 year included; extended optional, travel not included |
Surfscan FAQ
Which refurbished Surfscan detects the smallest particles?
The Surfscan 6420 Ultimate, at ≈ 0.10 µm (100 nm) at a 95% capture rate on bare silicon. The Surfscan 6220 Ultimate reaches ≈ 0.12 µm (120 nm).
Which Surfscan replaces a Surfscan 4500 or 5500?
The Surfscan 6100. Its red 632 nm HeNe laser keeps particle data in line with Surfscan 4500 and 5500 tools.
Which Surfscan models have SECS/GEM data output?
SECS/GEM is installed on the 6220 and 6420 Ultimate and optional on the Surfscan 6100 Upgraded, Enhanced and Ultimate.
How is a Surfscan calibrated?
Particle size response is calibrated with NIST-traceable PSL calibration wafer standards. The Ultimate models include full-deposition calibration wafers.
Can you upgrade or service an existing Surfscan?
Yes. For Surfscan 6100, 6200 and 6400 series tools we offer a solid state laser upgrade to replace the argon laser, a full refurbishment service and an annual parts contract.