Description
Solid state laser and power supply for KLA-Tencor Surfscan argon laser tools
| Product | Solid state laser and power supply, replacement for the Tencor argon ion gas laser |
| Fits | KLA-Tencor Surfscan tools with an argon ion laser; fit confirmed by model and serial number |
| Power Consumption | About 80% less than argon (laser, blower and heat-load reference) |
| Alignment | Custom quick laser-align design |
| Licensing | No license fee |
| Diagnostics | Error reporting with alarms |
| Laser Source | Off-the-shelf OEM solid state laser; thousands of units installed worldwide |
| Warranty | 3-year limited warranty on laser and power supply |
| Support | Tech support as needed |
| Lead Time | About 2 weeks, typical |
| Installation | Parts only, or field service engineer installation (USA only) |
Many Surfscan 6000-series tools still run the argon ion gas laser they were built with. Argon ion lasers are gas tubes that wear out, draw high power and need forced-air cooling, and replacing the tube and supply on a legacy Surfscan is a significant recurring cost. Supplier data puts the typical argon laser, power supply and installation replacement cycle at about every 24 months.
The Surfscan Solid State Laser Upgrade replaces the argon laser and its supply with a solid state laser and power supply. You cut power use by about 80%, remove a recurring replacement cost, and reduce the tech time and downtime that each argon laser change brings.
Why replace an argon ion laser with a solid state laser in a Surfscan?
Lower cost of ownership. An argon laser is a consumable. Each replacement means a new tube or supply, an installation visit and lost inspection time. A solid state laser removes that cycle and is backed by a 3-year limited warranty.
Less power and heat. The solid state laser uses about 80% less power, measured against the argon laser, its cooling blower and the heat load it adds to the room.
More uptime and faster service. The custom quick laser-align design shortens installation and realignment, and error reporting with alarms tells your technicians when something needs attention.
A supported laser source. The upgrade uses an off-the-shelf OEM solid state laser with thousands of units operating worldwide, so the laser itself is a current, supported product rather than legacy stock.
Before you order: confirm your Surfscan model
Send your Surfscan model, serial number and current laser type with your quote request. We confirm fit before quoting. If your tool also has an aging computer, combine this upgrade with the Surfscan CPU Upgrade Kit. For a full rebuild, see the KLA-Tencor Surfscan Refurbishment Service, and to cover laser and other parts year by year, see the Surfscan parts contract.
Looking for a complete system with a solid state laser already fitted? The Surfscan 6220 Ultimate and Surfscan 6420 Ultimate are refurbished with a new blue 488 nm solid state laser.
After any laser change, verify sizing with PSL Calibration Wafer Standards, or browse all Surfscan Wafer Defect Inspection Systems.
FAQs about the KLA-Tencor Surfscan Solid State Laser Upgrade
Which Surfscan tools does the solid state laser fit?
KLA-Tencor Surfscan tools that run an argon ion laser. Send your model and serial number and we will confirm fit before quoting.
What warranty does the laser have?
A 3-year limited warranty on the laser and power supply.
Can you install it?
Yes. Field service engineer installation is available in the USA, or you can order parts only.
Is there a license fee?
No. The solid state laser upgrade has no license fee.
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