Description
Tencor Surfscan 6420 Ultimate Refurbished with SECS/GEM data output and 1 year warranty
| System Type | Tencor/KLA-Tencor Surfscan 6420 Ultimate, unpatterned wafer surface inspection system (SSIS), refurbished |
| Particle Detection | ≈ 0.10 µm (100 nm) at a 95% capture rate, based on a PSL NIST calibration wafer standard; accuracy within 2% against its NIST-traceable standard |
| Laser | New BLUE solid state 488 nm laser |
| Data Output | SECS/GEM data protocol on brand-new main PC boards |
| Optics | LOW angle of incidence; optical mirrors cleaned, adjusted and calibrated |
| Detector | Photo Multiplier Tube (PMT) |
| Storage | Solid state hard drives |
| Wafer Size | Bare silicon 2–4 inch or 4–8 inch; maximum 200 mm (8 inch) |
| Included | Windows print server; 4 full-deposition, Calibration Wafer Standards, 100nm, 304nm, 700nm, 1019nm, 12 month warranty on parts |
| Power | 208 VAC, single-phase, 60 Hz, 17 A |
| Warranty | 12 months, extended warranty optional, travel not included |
| Lead Time | About 2 months, typical, this Surfscan 6420 Ultimate Refurbished Wafer Defect Inspection System available in 2nd Quarter 2027 |
The Surfscan 6420 Ultimate combines everything in the Surfscan 6220 Ultimate with SECS/GEM main boards, solid state hard drives, an included one-year warranty and the 488nm Blue Laser, adding low angle of incidence for increased particle detection sensitivity down to 100nm particle diameter. It scans bare silicon wafers for particles and surface anomalies, sizes each light point defect (LPD), produces a wafer map and provides haze-related (surface roughness) information for process monitoring and failure analysis. It is not intended for patterned wafers, wafer pieces, quartz masks or glass slides.
What does SECS/GEM data output add to a Refurbished Tencor Surfscan 6420?
SECS/GEM is the SEMI communication standard that semiconductor factories use to connect process and metrology tools to the factory host system. With SECS/GEM, the host can collect scan results, status and alarms directly from the Surfscan 6420 Wafer Inspection System to the HOST computer, instead of relying on printouts, manual entry or file transfers.
For a particle inspection step, that means LPD counts and haze results can feed statistical process control (SPC) charts automatically, lots can be dispositioned faster, and data-entry errors disappear. If your fab or lab runs a host system or MES, SECS/GEM is usually the deciding difference between the Ultimate and the Enhanced.
Surfscan 6220 Ultimate, Surfscan 6100 Ultimate or Surfscan 6420 Ultimate?
| Feature | Surfscan 6100 Upgraded | Surfscan 6100 Enhanced | Surfscan 6100 Ultimate | Surfscan 6220 Ultimate | Surfscan 6420 Ultimate |
| Particle detection on bare silicon | ≈ 0.204 µm (204 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.12 µm (120 nm) at 95% capture rate | ≈ 0.100 µm (100 nm) at 95% capture rate |
| Haze (surface roughness) measurements / resolution | Yes, customer calibrates | Yes, customer calibrates | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm |
| Laser and scan | Red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, blue, solid state 488 nm laser | New, blue, solid state 488 nm laser |
| Optical detector | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) |
| Incidence angle | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 204 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 160 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 160 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 120 nm & haze (surface roughness) measurements | Low-angle (oblique) incidence illumination for unpatterned silicon wafer defect detection down to 100 nm & haze (surface roughness) measurements |
| Main PC boards | Checked for system operation, engineering updates | Brand-new main PC boards supporting original design | Brand-new, improved main PC boards, optional SECS/GEM data output | Brand-new, improved main PC boards, including SECS/GEM data output | Brand-new, improved main PC boards, including SECS/GEM data output |
| SECS/GEM data output | Optional | Optional | Optional | Yes, SECS/GEM data protocol installed | Yes, SECS/GEM data protocol installed |
| Hard drives | Solid state | Solid state | Solid state | Solid state | Solid state |
| Optical mirrors cleaned and adjusted | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for blue 488 nm laser | Yes, optical system cleaned and adjusted for blue 488 nm laser |
| Calibration wafer standards | Optional, 3 full-deposition calibration wafer standards, 220 nm, 500 nm, 1019 nm | Optional, 3 full-deposition calibration wafer standards, 204 nm, 500 nm, 1019 nm | Included, 3 full-deposition calibration wafer standards, 204 nm, 500 nm, 1019 nm | Included, 4 full-deposition calibration wafer standards, 126 nm, 304 nm, 700 nm, 1019 nm | Included, 4 full-deposition calibration wafer standards, 100 nm, 304 nm, 700 nm, 1019 nm |
| Installation and calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration |
| Windows print server | Optional | Yes | Yes | Yes | Yes |
| Warranty | 6 months optional, travel not included | 6 months optional, travel not included | 6 months included; extended optional, travel not included | 1 year included; extended optional, travel not included | 1 year included; extended optional, travel not included |
| Availability | January 2027 | January 2027 | 1st Quarter 2027 | 1st Quarter 2027 | 2nd Quarter 2027 |
Extend coverage beyond the included warranty with a Surfscan parts contract, add PSL calibration wafer standards, or browse all Surfscan wafer inspection systems.
FAQs about the Tencor Surfscan 6420 Ultimate Refurbished Wafer Defect Inspection System
What is the difference between the Surfscan 6220 Ultimate and the Surfscan 6420 Ultimate?
The Surfscan 6420 Ultimate adds low angle of incidence to achieve 100nm particle defect sensitivity, brand-new Main PC boards with SECS/GEM data output, 100nm particle sensitivity, Haze measurements down to 0.02 ppm, solid state hard drives.
What warranty does the Surfscan 6420 Ultimate Refurbished include?
One year. Extended warranty is optional, SECS/Gem Data Output, new improved Main PC Boards and circuit boards; travel is not included.
What is the lead time?
Typically about 2 months. This Surfscan 6420 Refurbished Wafer Defect Inspection System is available in 2nd Quarter 2027
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