Description
Tencor Surfscan 6100 Enhanced with new HeNe laser and new main PC boards
| System Type | Tencor/KLA-Tencor Surfscan 6100 Enhanced, unpatterned wafer surface inspection system (SSIS), refurbished |
| Particle Detection | ≈ 0.16 µm (160 nm) at a 95% capture rate, based on a PSL NIST calibration wafer standard; accuracy within 2% against its NIST-traceable standard |
| Laser | New red 632 nm HeNe laser; correlates with Surfscan 4500 and 5500 particle data |
| Optics | Normal angle of incidence (90°); optical mirrors cleaned, adjusted and calibrated |
| Detector | Photo Multiplier Tube (PMT) |
| Electronics | Brand-new main PC boards |
| Wafer Size | Bare silicon 2–4 inch or 4–8 inch; maximum 200 mm (8 inch) |
| Included | Windows print server; |
| Power | 208 VAC, single-phase, 60 Hz, 17 A |
| Options | Warranty; installation and onsite calibration; maintenance parts; 3 full-deposition, Calibration Wafer Standards at 204nm, 500nm, 1019nm |
The Surfscan 6100 Enhanced is a refurbished Surfscan 6100 rebuilt around the parts that most affect measurement quality: the laser, the main electronics and the optical path. It scans bare silicon wafers for particles and other surface anomalies and also provides haze-related (surface roughness) information, which makes it suited to wafer process monitoring and failure analysis. It is not intended for patterned wafers, small wafer pieces, quartz masks or glass slides.
Three full-deposition calibration wafer standards (204, 500 and 1019 nm) are available as an option, so you can verify sizing response at installation and on a routine schedule. Additional PSL Calibration Wafer Standards are available from Cleanroom Metrology, which has supplied SSIS calibration standards for 28 years.
Why does the Tencor Surfscan 6100 Enhanced use a red 632 nm HeNe laser instead of the original argon laser?
The Surfscan 6000 series was originally built with a 30 mW argon gas laser in a raster scan, designed to detect particles down to about 204 nm. The 6100 Enhanced is refurbished with a new red 632 nm HeNe laser, brand-new main PC boards and a calibrated optical system, and is optimized for particle detection down to 160 nm.
The red wavelength also matters for data continuity. Surfscan 4500 and 5500 tools use a red laser, so a red-laser 6100 produces particle data that correlates with the results already in your records. That lets you replace a 40-year-old 4500 or 5500 without rebuilding particle specifications and control limits from scratch.
The 6100 uses normal-incidence (90°) illumination, a configuration suited to smooth surfaces such as bare silicon and to haze measurement.
Enhanced or Ultimate: which Surfscan 6100 configuration do you need?
Choose the Enhanced when you need measurement performance and calibration wafers; SECS/GEM host communication is optional. The Surfscan 6100 Ultimate adds brand-new, improved main PC boards, solid state hard drives, haze measurement down to 0.02 ppm, three included calibration wafers and a 6-month warranty. For a faster-shipping system, see the refurbished Surfscan 6100 Upgraded.
| Feature | Surfscan 6100 Upgraded | Surfscan 6100 Enhanced | Surfscan 6100 Ultimate | Surfscan 6220 Ultimate | Surfscan 6420 Ultimate |
| Particle detection on bare silicon | ≈ 0.204 µm (204 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.16 µm (160 nm) at 95% capture rate | ≈ 0.12 µm (120 nm) at 95% capture rate | ≈ 0.100 µm (100 nm) at 95% capture rate |
| Haze (surface roughness) measurements / resolution | Yes, customer calibrates | Yes, customer calibrates | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm | Haze down to 0.02 ppm, resolution @ 0.002 ppm |
| Laser and scan | Red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, red 632 nm HeNe, gas tube laser | New, blue, solid state 488 nm laser | New, blue, solid state 488 nm laser |
| Optical detector | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) | Photo-multiplier tube (PMT) |
| Incidence angle | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 204 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 160 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 160 nm & haze (surface roughness) measurements | Normal-incidence illumination for unpatterned silicon wafer defect detection down to 120 nm & haze (surface roughness) measurements | Low-angle (oblique) incidence illumination for unpatterned silicon wafer defect detection down to 100 nm & haze (surface roughness) measurements |
| Main PC boards | Checked for system operation, engineering updates | Brand-new main PC boards supporting original design | Brand-new, improved main PC boards, optional SECS/GEM data output | Brand-new, improved main PC boards, including SECS/GEM data output | Brand-new, improved main PC boards, including SECS/GEM data output |
| SECS/GEM data output | Optional | Optional | Optional | Yes, SECS/GEM data protocol installed | Yes, SECS/GEM data protocol installed |
| Hard drives | Solid state | Solid state | Solid state | Solid state | Solid state |
| Optical mirrors cleaned and adjusted | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for red 632.8 nm laser | Yes, optical system cleaned and adjusted for blue 488 nm laser | Yes, optical system cleaned and adjusted for blue 488 nm laser |
| Calibration wafer standards | Optional, 3 full-deposition calibration wafer standards, 220 nm, 500 nm, 1019 nm | Optional, 3 full-deposition calibration wafer standards, 204 nm, 500 nm, 1019 nm | Included, 3 full-deposition calibration wafer standards, 204 nm, 500 nm, 1019 nm | Included, 4 full-deposition calibration wafer standards, 126 nm, 304 nm, 700 nm, 1019 nm | Included, 4 full-deposition calibration wafer standards, 100 nm, 304 nm, 700 nm, 1019 nm |
| Installation and calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration | Optional onsite install, system check and size calibration |
| Windows print server | Optional | Yes | Yes | Yes | Yes |
| Warranty | 6 months optional, travel not included | 6 months optional, travel not included | 6 months included; extended optional, travel not included | 1 year included; extended optional, travel not included | 1 year included; extended optional, travel not included |
| Availability | January 2027 | January 2027 | 1st Quarter 2027 | 1st Quarter 2027 | 2nd Quarter 2027 |
Protect uptime after delivery with a Tencor Surfscan parts contract, or browse all Tencor Surfscan wafer defect inspection systems.
FAQs about the Tencor Surfscan 6100 Enhanced
What is new in the Surfscan 6100 Enhanced?
A new red 632 nm HeNe laser and brand-new main PC boards. The optical mirrors are cleaned, adjusted and calibrated.
Does the Enhanced include SECS/GEM?
SECS/GEM data output is optional on the Enhanced.
Are calibration wafers included?
Three full-deposition calibration wafer standards (204, 500 and 1019 nm) are optional.
Is installation included?
Installation and onsite calibration are optional and quoted separately, as is warranty.
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